PlasmaTherm Software Upgrade
For the past 15 years, Qualtx Technology has been providing software upgrades and control system retrofits for PlasmaTherm, PlasmaQuest and Veeco process equipment.
Qualtx Technology has developed a replacement control system for PlasmaTherm process tools using non-proprietary IO components and modern Windows 7 compatible control system software.
Software Updates for the following models:
Plasmatherm 790 RIE/ PECVD
Plasmatherm SLR-720 RIE
Plasmatherm SLR-730 PECVD
Plasmatherm SLR-770 ICP
Plasmatherm Dual Chamber Systems